- Semiconductor PartsHDP-CVD
- Domes used for the HDP CVD process is composed of ceramics, copper tubes, bracket for fixing tubes, silicones, etc.
The copper tube has high thermal conductivity, but due to chemical reaction with coolants that flows inside during the process,
it gathers precipitates and it rusts to cause leaks, having a short life span compared to other parts and becoming the major reason that shortens the replacement period of the dome.
- Our company has 20-year experience of repairing domes of various products
in the range of 200~300mm and has technology for it.
- (Owned Patent : Refurnishing method of ceramic dome using HDP-CVD process, Application No : 10-2019-0096637)